Using Atomic Layer Deposition (ALD), various ceramic coatings on titanium such as Al2O3 and TiO2 are being experimented to investigate their hydroxyapatite formation ability through a biomimetic ...
They then chemically cleaned and passivated the wafers with a surface passivation layer made of aluminum oxide (Al2O3) deposited via plasma-assisted atomic layer deposition (ALD) at 180 C for 78 ...