Increasing wafer size as well as a trend toward ... companies have turned to automated material handling systems (AMHS) (Fig. 32.1) to ensure that the right material is delivered to the right place at ...

wafer cassette design has kept pace. Semiconductor fabrication now involves higher automation levels, greater tool uptime and throughput, higher process temperatures, additional mask layers, and ...

STAMFORD, Conn., October 1, 2012— Worldwide wafer fab equipment (WFE) spending is on pace to total $31.4 billion in 2012, a decline of 13.3 percent from 2011 spending of $36.2 billion, according to ...