EurekAlert!2y
Schematic of various optical systems that are capable of tackling the diverse challenges in patterned defect inspection (IMAGE)
Patterned wafer containing logic dies and 3D NAND memory dies, (f) X-ray ptychography, (g) THz wave-based defect inspection system, and (h) Coherent Fourier scatterometry techniques using ...
Nature1mon
Lithography gets extreme
Photolithography uses light to transfer a pattern of features from a mask to a light-sensitive chemical photoresist on a semiconductor wafer. As the pattern is transferred, it is reduced in scale ...