Their study was published in Laser & Photonics Reviews. Photolithography plays a crucial role in the manufacture of integrated circuit chips and is one of the key core technologies in the ...
A team led by Sun Haiding from the University of Science and Technology of China (USTC) has developed a vertically integrated micro-LED array which was then applied in deep ultraviolet (DUV) maskless ...
Abstract: Photolithography using 193-nm light appears to be a viable route for the extension of optical lithography to the dimensions required for the manufacture of 1Gb DRAM and advanced CMOS ...
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