PuroMaxx Cleaning Solutions | Solutions | Brooks - Brooks …
网页The PuroMaxx 800 fully automatic 300mm FOUP cleaner combines the best particle and AMC cleaning performance and provides humidity control at the highest throughput. Vacuum decontamination chambers are integrated to the footprint and loaded by the robot.
FOUP/FOSB cleaner - TSC 崇越科技
网页全自动FOUP/FOSB Cleaner：专利的真空干燥技术实现了FOUP/FOSB清洗后达到完全干燥效果。 槽式FOUP/FOSB Cleaner： 通过使用高性能清洗剂的喷头清洗、利用air blow方式除水干燥，并且实现了高生产效率。
UPC-12500 SORA Fully Automatic FOUP Cleaning System
网页The 12500 is a fully automatic FOUP Cleaning System with excellent performance, throughput and reliability. Advancements for the new system include higher throughput, energy savings, and a smaller footprint. The UPC-12500 was designed and manufactured based on SEMI standard, UL and CE marking.
IF-12 FOUP/FOSB Cleaning System - Semiconductor Equipment …
网页Cleaning FOUPs and FOSBs is required to improve and maintain the yield of the semiconductor manufacturing process. The IF-12 can wash and dry a variety of FOUPs and FOSBs in one system without changing the set-up because of our unique chamber structure.
Products > Customizable FOUP/ Cassette Cleaning Machine
网页FOUP cleaner can improve yield by reducing FOUP contaminations. Remove particles; Reduce humidity; Reduce AMC; Low cross-contamination
FOUP清洗机 – 東洋技術股份有限公司
网页FOUP清洗机. (TCL-FS3000) 特性. 可清洗FOUP/FOSB/RSP/Cassettes及其他可装载于专用清洗篮之制品。 伺服马达驱动,设有扭力侦测安全机构，防止人为误操作造成损坏及危险。 具备停机自动归位功能，方便装载清洗制品 (独家技术)。 旋干制程中除IR干燥外，独家运用气流干燥，可加速去除较大水滴，增进干燥效果; 进而提升效率。 了解更多. 规格表.
PuroMaxx Contamination Control Solutions - Brooks
网页Brooks offers the industry’s most advanced suite of FOUP carrier/reticle pod cleaners and photomask/reticle stockers. Using state-of-the-art humidity control along with in-situ metrology, our products address all critical airborne molecular contamination, productivity, and process stability challenges at sub20-nm nodes.
Brooks Puromaxx 800 Fully Automatic 300Mm FOUP Cleaner
网页The PuroMaxx 800 fully automatic 300mm FOUP cleaner combines the best particle and AMC cleaning performance and provides humidity control at the highest throughput. Vacuum decontamination chambers are integrated to the footprint and loaded by the robot.
FX-30 FOUP FOSB Cleaner - Merck
网页Our FX-30 FOUP FOSB Cleaner is specifically engineered for 300mm FOUPs (Front Opening Unified Pods) and FOSBs (Front Opening Supply Boxes). The use of a solution isolation technology provides superior cleaning and drying performance in a compact unit.
FOUP Cleaner – 東洋技術股份有限公司 - toyo-adtec.com.tw
网页Feature. It can suit on FOUP/ FOSB/ RSP/ Cassette or others which can place on it. Using serve motor drive, in addition to IR drying in the spin-drying process, also exclusive use of air nozzle drying to improve drying effect. Exclusive on automatic zero return function when shutdown, easy to load up products. More Details.
跳至内容