FOUP Purge System - Fabmatics
网页The retrofittable Purge System by Fabmatics purges FOUPs with an inert gas during interim storage. Thus, it reliably protects wafers between process steps from undesired chemical reactions due to humidity and Evaporation.
在FOUP卸载模块应用质量流量控制器进行氮气吹扫 - 布琅轲锶特
网页前开式晶圆传送盒（FOUP）卸载模块的功能是在等待下一个工艺步骤的同时暂存晶圆。 由于制造环境的清洁度是影响产品成品率的主要因素之一，因此晶圆搬运和存储设备的性能是半导体制造中的关键工序。 优化的晶圆处理/存储工艺应尽量减少可能导致半导体晶圆金属氧化或丧失导电性的水分、颗粒和氧气。 此应用案例主角是一家半导体公司。 他们使用先进技术在硅晶圆片上制造芯片，应用于不同的应用和设备，如电信、游戏、工业等。 工厂遍布各 …
FOUP N2 purge engineering in Fab - IEEE Xplore
网页2013年9月6日 · Airborne molecular contamination (AMC) becomes more serious in Fab as the device shrinks and wafer size increases, an economic way for preventing these contaminations is to use N 2 purge charging process. The practical FOUP N 2 purge engineering is addressed here, which includes the maintenance and management of FOUPs, N 2 purge charging flow ...
N2 Purge 吹淨系統 | Festo TW
网页N2 Purge 吹淨系統由比例方向控制閥 (適用於不同流量)，採用壓電閥技術的 MFC 質量流量控制器、和以 RS48/EtherCAT 與類比訊號為例的多種通訊方式構成。 具有以下關鍵特點，使其成為晶片製造商的理想選擇：
FOUP purge performance improvement using EFEM flow converter
网页2016年6月16日 · Front Opening Unified Pod (FOUP) purging with nitrogen or clean dry air (CDA) is well known as the most effective method to protect wafers inside FOUPs from internal as well as external contaminations, e.g. particles, airborne molecular contaminants, humidity and oxygen, which can potentially damage integrated circuits (IC) and significantly ...
Advanced FOUP purge using diffusers for FOUP door-off …
网页2014年5月21日 · Nitrogen purge of closed Front Opening Unified Pods (FOUP) have been implemented in many fabs to minimize wafer's exposure to the contaminants (or CDA purge if oxygen is not of concern). As the technology node advances, the need for minimizing the exposure has become even more stringent and in some processes requires FOUP purge while the FOUP ...
FOUP Purge System – 竑瑞科技股份有限公司
网页The FOUP Purge System by Fabmatics avoids oxidation and other chemical reactions on the wafer surface by purging the FOUP with an inert gas (e. g. N2) during interim storage. The system can be easily retrofitted to existing storage modules (e.g. OHT buffer places, stockers, racks).
网页Our purge system avoids oxidation and other chemical reactions by purg-ing the FOUP with an inert gas during interim storage between two process steps. The system can be easily retrofitted to existing storage bins (e.g. Zero Foot-print Storage) in cleanrooms.
FOUP N2 purge engineering in Fab - Semantic Scholar
网页The practical FOUP N2 purge engineering is addressed here, which includes the maintenance and management of FOUPs, N2 purge charging flow rate, the design of nozzle, selection of nuzzle material, and tool configuration. View on IEEE. doi.org. Save to Library. Create Alert. Cite. Figures from this paper. figure 1. figure 2. figure 4. figure 5.
Flow analysis of a front opening unified pod (FOUP) subjected …
网页2021年11月1日 · In portable wafer carriers called front opening unified pods (FOUPs), the current industry-accepted methods of moisture control are gas purging and laminar air curtain (LAC). Both typically use purified clean dry air (CDA).
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